# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | N. Herguedas and E. Carretero. Optical properties in mid-infrared range of silicon oxide thin films with different stoichiometries. Nanomaterials 13, 2749 (2023) COMMENTS: | SiO1.71. Sputtered Si with 40 sccm O2 and 160 sccm Ar, which is equivalent to a oxygen partial pressure of 3.2 × 10-4 mbar and a total pressure of 1.7 × 10-3 mbar. Room temperature. DATA: - type: tabulated nk data: | 5.000 1.387 0.001 5.005 1.387 0.001 5.010 1.387 0.001 5.015 1.386 0.001 5.020 1.386 0.001 5.025 1.386 0.001 5.030 1.385 0.001 5.035 1.385 0.001 5.040 1.385 0.001 5.045 1.385 0.001 5.051 1.384 0.001 5.056 1.384 0.001 5.061 1.384 0.001 5.066 1.384 0.001 5.071 1.383 0.001 5.076 1.383 0.001 5.081 1.383 0.001 5.086 1.382 0.001 5.092 1.382 0.001 5.097 1.382 0.001 5.102 1.382 0.001 5.107 1.381 0.001 5.112 1.381 0.001 5.118 1.381 0.001 5.123 1.380 0.001 5.128 1.380 0.001 5.133 1.380 0.001 5.139 1.380 0.001 5.144 1.379 0.001 5.149 1.379 0.001 5.155 1.379 0.001 5.160 1.378 0.001 5.165 1.378 0.001 5.171 1.378 0.001 5.176 1.377 0.001 5.181 1.377 0.001 5.187 1.377 0.001 5.192 1.376 0.001 5.198 1.376 0.001 5.203 1.376 0.001 5.208 1.376 0.001 5.214 1.375 0.001 5.219 1.375 0.001 5.225 1.375 0.001 5.230 1.374 0.001 5.236 1.374 0.001 5.241 1.374 0.001 5.247 1.373 0.001 5.252 1.373 0.001 5.258 1.373 0.001 5.263 1.372 0.001 5.269 1.372 0.001 5.274 1.372 0.001 5.280 1.371 0.001 5.285 1.371 0.001 5.291 1.371 0.001 5.297 1.370 0.001 5.302 1.370 0.001 5.308 1.370 0.001 5.313 1.369 0.001 5.319 1.369 0.001 5.325 1.369 0.001 5.330 1.368 0.001 5.336 1.368 0.001 5.342 1.367 0.001 5.348 1.367 0.001 5.353 1.367 0.001 5.359 1.366 0.001 5.365 1.366 0.001 5.371 1.366 0.001 5.376 1.365 0.001 5.382 1.365 0.001 5.388 1.365 0.001 5.394 1.364 0.001 5.400 1.364 0.001 5.405 1.363 0.001 5.411 1.363 0.001 5.417 1.363 0.001 5.423 1.362 0.001 5.429 1.362 0.001 5.435 1.362 0.001 5.441 1.361 0.001 5.447 1.361 0.001 5.453 1.360 0.001 5.459 1.360 0.001 5.464 1.360 0.001 5.470 1.359 0.001 5.476 1.359 0.001 5.482 1.358 0.001 5.488 1.358 0.001 5.495 1.358 0.001 5.501 1.357 0.001 5.507 1.357 0.001 5.513 1.356 0.001 5.519 1.356 0.001 5.525 1.355 0.001 5.531 1.355 0.001 5.537 1.355 0.001 5.543 1.354 0.001 5.549 1.354 0.001 5.556 1.353 0.001 5.562 1.353 0.001 5.568 1.352 0.001 5.574 1.352 0.001 5.580 1.352 0.001 5.587 1.351 0.001 5.593 1.351 0.001 5.599 1.350 0.001 5.605 1.350 0.001 5.612 1.349 0.001 5.618 1.349 0.001 5.624 1.348 0.001 5.631 1.348 0.001 5.637 1.347 0.001 5.643 1.347 0.001 5.650 1.346 0.001 5.656 1.346 0.001 5.663 1.346 0.001 5.669 1.345 0.001 5.675 1.345 0.001 5.682 1.344 0.001 5.688 1.344 0.001 5.695 1.343 0.001 5.701 1.343 0.001 5.708 1.342 0.001 5.714 1.342 0.001 5.721 1.341 0.001 5.727 1.341 0.001 5.734 1.340 0.001 5.741 1.340 0.001 5.747 1.339 0.001 5.754 1.339 0.001 5.760 1.338 0.001 5.767 1.337 0.001 5.774 1.337 0.001 5.780 1.336 0.001 5.787 1.336 0.001 5.794 1.335 0.001 5.800 1.335 0.001 5.807 1.334 0.001 5.814 1.334 0.001 5.821 1.333 0.001 5.828 1.333 0.001 5.834 1.332 0.001 5.841 1.331 0.001 5.848 1.331 0.001 5.855 1.330 0.001 5.862 1.330 0.001 5.869 1.329 0.001 5.875 1.329 0.001 5.882 1.328 0.001 5.889 1.327 0.001 5.896 1.327 0.001 5.903 1.326 0.001 5.910 1.326 0.001 5.917 1.325 0.001 5.924 1.324 0.001 5.931 1.324 0.001 5.938 1.323 0.001 5.945 1.322 0.001 5.952 1.322 0.001 5.959 1.321 0.001 5.967 1.321 0.001 5.974 1.320 0.001 5.981 1.319 0.001 5.988 1.319 0.001 5.995 1.318 0.001 6.002 1.317 0.001 6.010 1.317 0.001 6.017 1.316 0.002 6.024 1.315 0.002 6.031 1.315 0.002 6.039 1.314 0.002 6.046 1.313 0.002 6.053 1.312 0.002 6.061 1.312 0.002 6.068 1.311 0.002 6.075 1.310 0.002 6.083 1.310 0.002 6.090 1.309 0.002 6.098 1.308 0.002 6.105 1.307 0.002 6.112 1.307 0.002 6.120 1.306 0.002 6.127 1.305 0.002 6.135 1.304 0.002 6.143 1.304 0.002 6.150 1.303 0.002 6.158 1.302 0.002 6.165 1.301 0.002 6.173 1.301 0.002 6.180 1.300 0.002 6.188 1.299 0.002 6.196 1.298 0.002 6.203 1.297 0.002 6.211 1.297 0.002 6.219 1.296 0.002 6.227 1.295 0.002 6.234 1.294 0.002 6.242 1.293 0.002 6.250 1.292 0.002 6.258 1.292 0.002 6.266 1.291 0.002 6.274 1.290 0.002 6.281 1.289 0.002 6.289 1.288 0.002 6.297 1.287 0.002 6.305 1.286 0.002 6.313 1.285 0.002 6.321 1.284 0.002 6.329 1.283 0.002 6.337 1.283 0.002 6.345 1.282 0.002 6.353 1.281 0.002 6.361 1.280 0.002 6.369 1.279 0.002 6.378 1.278 0.002 6.386 1.277 0.002 6.394 1.276 0.002 6.402 1.275 0.002 6.410 1.274 0.002 6.418 1.273 0.002 6.427 1.272 0.002 6.435 1.271 0.002 6.443 1.270 0.002 6.452 1.269 0.002 6.460 1.268 0.002 6.468 1.266 0.002 6.477 1.265 0.002 6.485 1.264 0.002 6.494 1.263 0.002 6.502 1.262 0.002 6.510 1.261 0.002 6.519 1.260 0.002 6.527 1.259 0.002 6.536 1.257 0.002 6.545 1.256 0.003 6.553 1.255 0.003 6.562 1.254 0.003 6.570 1.253 0.003 6.579 1.252 0.003 6.588 1.250 0.003 6.596 1.249 0.003 6.605 1.248 0.003 6.614 1.247 0.003 6.623 1.245 0.003 6.631 1.244 0.003 6.640 1.243 0.003 6.649 1.241 0.003 6.658 1.240 0.003 6.667 1.239 0.003 6.676 1.237 0.003 6.684 1.236 0.003 6.693 1.235 0.003 6.702 1.233 0.003 6.711 1.232 0.003 6.720 1.230 0.003 6.729 1.229 0.003 6.739 1.227 0.003 6.748 1.226 0.003 6.757 1.224 0.003 6.766 1.223 0.003 6.775 1.221 0.003 6.784 1.220 0.003 6.793 1.218 0.003 6.803 1.217 0.003 6.812 1.215 0.003 6.821 1.214 0.003 6.831 1.212 0.003 6.840 1.210 0.004 6.849 1.209 0.004 6.859 1.207 0.004 6.868 1.205 0.004 6.878 1.203 0.004 6.887 1.202 0.004 6.897 1.200 0.004 6.906 1.198 0.004 6.916 1.196 0.004 6.925 1.194 0.004 6.935 1.193 0.004 6.944 1.191 0.004 6.954 1.189 0.004 6.964 1.187 0.004 6.974 1.185 0.004 6.983 1.183 0.004 6.993 1.181 0.004 7.003 1.179 0.004 7.013 1.177 0.004 7.022 1.175 0.004 7.032 1.173 0.005 7.042 1.170 0.005 7.052 1.168 0.005 7.062 1.166 0.005 7.072 1.164 0.005 7.082 1.161 0.005 7.092 1.159 0.005 7.102 1.157 0.005 7.112 1.154 0.005 7.123 1.152 0.005 7.133 1.150 0.005 7.143 1.147 0.005 7.153 1.145 0.005 7.163 1.142 0.005 7.174 1.139 0.005 7.184 1.137 0.006 7.194 1.134 0.006 7.205 1.131 0.006 7.215 1.128 0.006 7.225 1.126 0.006 7.236 1.123 0.006 7.246 1.120 0.006 7.257 1.117 0.006 7.267 1.114 0.006 7.278 1.111 0.006 7.289 1.108 0.007 7.299 1.104 0.007 7.310 1.101 0.007 7.321 1.098 0.007 7.331 1.095 0.007 7.342 1.091 0.007 7.353 1.088 0.007 7.364 1.084 0.007 7.375 1.080 0.008 7.386 1.077 0.008 7.396 1.073 0.008 7.407 1.069 0.008 7.418 1.065 0.008 7.429 1.061 0.008 7.440 1.057 0.009 7.452 1.053 0.009 7.463 1.048 0.009 7.474 1.044 0.009 7.485 1.039 0.009 7.496 1.035 0.010 7.508 1.030 0.010 7.519 1.025 0.010 7.530 1.020 0.011 7.541 1.015 0.011 7.553 1.010 0.011 7.564 1.004 0.012 7.576 0.999 0.012 7.587 0.993 0.012 7.599 0.987 0.013 7.610 0.981 0.014 7.622 0.975 0.014 7.634 0.969 0.015 7.645 0.962 0.015 7.657 0.955 0.016 7.669 0.948 0.017 7.680 0.941 0.018 7.692 0.934 0.019 7.704 0.926 0.020 7.716 0.918 0.021 7.728 0.910 0.023 7.740 0.902 0.024 7.752 0.893 0.026 7.764 0.884 0.028 7.776 0.874 0.030 7.788 0.865 0.032 7.800 0.855 0.035 7.812 0.845 0.038 7.825 0.834 0.041 7.837 0.823 0.044 7.849 0.812 0.048 7.862 0.800 0.053 7.874 0.788 0.057 7.886 0.776 0.063 7.899 0.763 0.068 7.911 0.750 0.075 7.924 0.736 0.082 7.937 0.723 0.090 7.949 0.709 0.099 7.962 0.695 0.109 7.974 0.681 0.119 7.987 0.666 0.131 8.000 0.652 0.144 8.013 0.638 0.158 8.026 0.624 0.173 8.039 0.611 0.189 8.052 0.598 0.207 8.065 0.586 0.226 8.078 0.576 0.246 8.091 0.566 0.267 8.104 0.558 0.289 8.117 0.551 0.311 8.130 0.545 0.334 8.143 0.541 0.357 8.157 0.539 0.381 8.170 0.538 0.404 8.183 0.538 0.426 8.197 0.539 0.449 8.210 0.542 0.470 8.224 0.546 0.492 8.237 0.550 0.512 8.251 0.555 0.532 8.264 0.561 0.551 8.278 0.568 0.569 8.292 0.575 0.586 8.306 0.582 0.603 8.319 0.590 0.619 8.333 0.598 0.634 8.347 0.606 0.648 8.361 0.614 0.662 8.375 0.622 0.675 8.389 0.630 0.687 8.403 0.638 0.698 8.418 0.645 0.709 8.432 0.653 0.720 8.446 0.660 0.730 8.460 0.667 0.739 8.475 0.673 0.748 8.489 0.678 0.757 8.503 0.684 0.765 8.518 0.688 0.773 8.532 0.692 0.782 8.547 0.695 0.790 8.562 0.698 0.798 8.576 0.700 0.806 8.591 0.701 0.815 8.606 0.702 0.824 8.621 0.702 0.833 8.636 0.701 0.844 8.651 0.700 0.854 8.666 0.698 0.866 8.681 0.696 0.879 8.696 0.694 0.893 8.711 0.691 0.908 8.726 0.688 0.924 8.741 0.686 0.942 8.757 0.683 0.961 8.772 0.681 0.981 8.787 0.680 1.003 8.803 0.680 1.026 8.818 0.680 1.051 8.834 0.682 1.076 8.850 0.685 1.103 8.865 0.689 1.131 8.881 0.695 1.160 8.897 0.703 1.190 8.913 0.712 1.220 8.929 0.724 1.251 8.945 0.737 1.282 8.961 0.753 1.314 8.977 0.770 1.345 8.993 0.789 1.376 9.009 0.810 1.407 9.025 0.834 1.437 9.042 0.859 1.467 9.058 0.886 1.496 9.074 0.915 1.524 9.091 0.946 1.551 9.107 0.979 1.577 9.124 1.013 1.601 9.141 1.049 1.624 9.158 1.087 1.646 9.174 1.126 1.666 9.191 1.166 1.684 9.208 1.207 1.700 9.225 1.250 1.715 9.242 1.293 1.727 9.259 1.338 1.738 9.276 1.383 1.747 9.294 1.429 1.753 9.311 1.475 1.757 9.328 1.521 1.759 9.346 1.568 1.759 9.363 1.615 1.756 9.381 1.662 1.752 9.398 1.709 1.745 9.416 1.755 1.735 9.434 1.801 1.724 9.452 1.846 1.710 9.470 1.891 1.695 9.488 1.934 1.677 9.506 1.977 1.657 9.524 2.019 1.635 9.542 2.059 1.612 9.560 2.098 1.586 9.579 2.136 1.559 9.597 2.172 1.530 9.615 2.207 1.500 9.634 2.239 1.468 9.653 2.270 1.435 9.671 2.300 1.401 9.690 2.327 1.365 9.709 2.353 1.329 9.728 2.376 1.292 9.747 2.398 1.254 9.766 2.417 1.215 9.785 2.434 1.177 9.804 2.450 1.137 9.823 2.463 1.098 9.843 2.474 1.059 9.862 2.483 1.019 9.881 2.491 0.980 9.901 2.496 0.941 9.921 2.499 0.903 9.940 2.501 0.865 9.960 2.501 0.827 9.980 2.499 0.791 10.000 2.495 0.755 10.020 2.490 0.720 10.040 2.483 0.686 10.060 2.475 0.653 10.081 2.466 0.621 10.101 2.456 0.591 10.121 2.444 0.561 10.142 2.431 0.533 10.163 2.418 0.506 10.183 2.403 0.481 10.204 2.388 0.457 10.225 2.372 0.434 10.246 2.356 0.413 10.267 2.339 0.392 10.288 2.322 0.374 10.309 2.305 0.356 10.331 2.288 0.340 10.352 2.270 0.325 10.373 2.253 0.311 10.395 2.235 0.299 10.417 2.218 0.288 10.438 2.201 0.277 10.460 2.185 0.268 10.482 2.168 0.260 10.504 2.153 0.252 10.526 2.137 0.246 10.549 2.122 0.240 10.571 2.107 0.235 10.593 2.093 0.230 10.616 2.080 0.226 10.638 2.067 0.223 10.661 2.054 0.220 10.684 2.042 0.218 10.707 2.030 0.215 10.730 2.019 0.214 10.753 2.009 0.212 10.776 1.999 0.211 10.799 1.989 0.210 10.823 1.980 0.209 10.846 1.971 0.208 10.870 1.962 0.207 10.893 1.954 0.206 10.917 1.946 0.205 10.941 1.938 0.205 10.965 1.930 0.204 10.989 1.923 0.204 11.013 1.916 0.203 11.038 1.909 0.202 11.062 1.902 0.202 11.086 1.895 0.202 11.111 1.888 0.201 11.136 1.882 0.201 11.161 1.875 0.201 11.186 1.869 0.201 11.211 1.862 0.201 11.236 1.856 0.201 11.261 1.849 0.201 11.287 1.843 0.201 11.312 1.837 0.202 11.338 1.831 0.203 11.364 1.824 0.204 11.390 1.818 0.205 11.416 1.812 0.206 11.442 1.807 0.208 11.468 1.801 0.210 11.494 1.795 0.212 11.521 1.790 0.214 11.547 1.785 0.217 11.574 1.780 0.220 11.601 1.775 0.223 11.628 1.771 0.226 11.655 1.767 0.230 11.682 1.763 0.234 11.710 1.759 0.238 11.737 1.756 0.242 11.765 1.754 0.246 11.792 1.751 0.250 11.820 1.749 0.255 11.848 1.748 0.259 11.876 1.747 0.263 11.905 1.746 0.268 11.933 1.746 0.272 11.962 1.746 0.276 11.990 1.747 0.280 12.019 1.748 0.284 12.048 1.749 0.288 12.077 1.751 0.291 12.107 1.753 0.294 12.136 1.756 0.297 12.165 1.759 0.300 12.195 1.761 0.302 12.225 1.765 0.304 12.255 1.768 0.305 12.285 1.772 0.306 12.315 1.775 0.307 12.346 1.779 0.307 12.376 1.783 0.307 12.407 1.787 0.306 12.438 1.790 0.305 12.469 1.794 0.304 12.500 1.798 0.302 12.531 1.801 0.300 12.563 1.805 0.297 12.594 1.808 0.294 12.626 1.811 0.291 12.658 1.814 0.288 12.690 1.816 0.284 12.723 1.818 0.280 12.755 1.820 0.276 12.788 1.822 0.272 12.821 1.824 0.267 12.853 1.825 0.262 12.887 1.825 0.258 12.920 1.826 0.253 12.953 1.826 0.248 12.987 1.826 0.243 13.021 1.825 0.238 13.055 1.825 0.233 13.089 1.824 0.228 13.123 1.822 0.223 13.158 1.821 0.218 13.193 1.819 0.213 13.228 1.816 0.209 13.263 1.814 0.204 13.298 1.811 0.200 13.333 1.808 0.196 13.369 1.805 0.192 13.405 1.802 0.188 13.441 1.799 0.184 13.477 1.795 0.181 13.514 1.791 0.177 13.550 1.788 0.174 13.587 1.784 0.171 13.624 1.780 0.169 13.661 1.776 0.166 13.699 1.771 0.164 13.736 1.767 0.162 13.774 1.763 0.160 13.812 1.759 0.159 13.850 1.755 0.157 13.889 1.750 0.156 13.928 1.746 0.155 13.966 1.742 0.154 14.006 1.738 0.153 14.045 1.734 0.152 14.085 1.730 0.152 14.124 1.726 0.151 14.164 1.722 0.151 14.205 1.718 0.151 14.245 1.714 0.151 14.286 1.710 0.151 14.327 1.707 0.151 14.368 1.703 0.151 14.409 1.700 0.152 14.451 1.696 0.152 14.493 1.693 0.153 14.535 1.689 0.153 14.577 1.686 0.154 14.620 1.683 0.155 14.663 1.680 0.155 14.706 1.677 0.156 14.749 1.674 0.157 14.793 1.671 0.158 14.837 1.668 0.159 14.881 1.665 0.160 14.925 1.662 0.161 14.970 1.659 0.161 15.015 1.657 0.162 15.060 1.654 0.163 15.106 1.651 0.164 15.152 1.649 0.166 15.198 1.646 0.167 15.244 1.643 0.168 15.291 1.641 0.169 15.337 1.638 0.170 15.385 1.636 0.171 15.432 1.634 0.172 15.480 1.631 0.173 15.528 1.629 0.174 15.576 1.626 0.175 15.625 1.624 0.177 15.674 1.622 0.178 15.723 1.619 0.179 15.773 1.617 0.180 15.823 1.615 0.181 15.873 1.612 0.182 15.924 1.610 0.183 15.974 1.608 0.185 16.026 1.605 0.186 16.077 1.603 0.187 16.129 1.601 0.188 16.181 1.598 0.189 16.234 1.596 0.191 16.287 1.593 0.192 16.340 1.591 0.193 16.393 1.589 0.194 16.447 1.586 0.196 16.502 1.584 0.197 16.556 1.581 0.198 16.611 1.579 0.199 16.667 1.576 0.201 16.722 1.573 0.202 16.779 1.571 0.203 16.835 1.568 0.204 16.892 1.565 0.206 16.949 1.562 0.207 17.007 1.559 0.208 17.065 1.557 0.210 17.123 1.554 0.211 17.182 1.550 0.212 17.241 1.547 0.214 17.301 1.544 0.215 17.361 1.541 0.217 17.422 1.537 0.218 17.483 1.534 0.220 17.544 1.530 0.221 17.606 1.526 0.223 17.668 1.522 0.224 17.730 1.518 0.226 17.794 1.514 0.228 17.857 1.510 0.229 17.921 1.505 0.231 17.986 1.500 0.233 18.051 1.495 0.235 18.116 1.490 0.237 18.182 1.485 0.239 18.248 1.479 0.241 18.315 1.473 0.243 18.382 1.467 0.246 18.450 1.460 0.249 18.519 1.453 0.251 18.587 1.446 0.254 18.657 1.438 0.258 18.727 1.430 0.261 18.797 1.421 0.265 18.868 1.412 0.269 18.939 1.402 0.274 19.011 1.392 0.279 19.084 1.381 0.285 19.157 1.369 0.292 19.231 1.357 0.299 19.305 1.344 0.308 19.380 1.330 0.318 19.455 1.316 0.329 19.531 1.302 0.341 19.608 1.287 0.355 19.685 1.271 0.372 19.763 1.256 0.390 19.841 1.240 0.410 19.920 1.225 0.433 20.000 1.211 0.459 20.080 1.198 0.488 20.161 1.187 0.519 20.243 1.177 0.553 20.325 1.171 0.589 20.408 1.167 0.628 20.492 1.167 0.668 20.576 1.170 0.710 20.661 1.178 0.753 20.747 1.190 0.796 20.833 1.206 0.838 20.921 1.226 0.880 21.008 1.250 0.921 21.097 1.277 0.960 21.186 1.309 0.997 21.277 1.343 1.031 21.368 1.381 1.063 21.459 1.421 1.092 21.552 1.463 1.117 21.645 1.508 1.140 21.739 1.554 1.159 21.834 1.602 1.174 21.930 1.650 1.186 22.026 1.700 1.194 22.124 1.749 1.198 22.222 1.799 1.198 22.321 1.848 1.195 22.422 1.897 1.189 22.523 1.944 1.179 22.624 1.991 1.165 22.727 2.036 1.148 22.831 2.079 1.129 22.936 2.120 1.106 23.041 2.159 1.081 23.148 2.196 1.054 23.256 2.230 1.024 23.364 2.261 0.993 23.474 2.290 0.960 23.585 2.316 0.925 23.697 2.339 0.890 23.810 2.358 0.854 23.923 2.375 0.817 24.038 2.389 0.780 24.155 2.401 0.744 24.272 2.409 0.707 24.390 2.415 0.671 24.510 2.418 0.636 24.631 2.419 0.602 24.752 2.417 0.568 24.876 2.414 0.537 25.000 2.408 0.506